NEWS

Governor Pataki Visits Clarkson to Announce $4.5m Research Grant

CAMP Professor Egon Matijevic' Donates Sculpture to Clarkson University

NYSTAR Executive Director Dr. Russell Bessette to Receive Honorary Degree at Clarkson

CAMP Professors Offer Short Courses on Diverse Topics

CAMP Professors Complete NSF Multimedia Development Project

CAMP Sponsors Seventh International Symposium on Chemical-Mechanical Polishing (CMP)

 

 
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CLARKSON UNIVERSITY · POTSDAM · NEW YORK 13699 · VOLUME 18 NO 3 · MARCH 2003

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

CAMP Newsletter


March 2003

Volume 18,
Number 3

 

NYSTAR-DESIGNATED CENTER FOR ADVANCED TECHNOLOGY
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CENTER FOR ADVANCED MATERIALS PROCESSING
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Table of Contents:

RESEARCH

CAMP CONTINUES TO INVESTIGATE VARIOUS ASPECTS OF THE CHEMICAL-MECHANICAL POLISHING PROCESS

 

Chemical-Mechanical Planarization

Abrasive Particles and CMP

Hard Core and Soft Surface Abrasives for Use in CMP

Smart Particles for Copper CMP

Abrasive-Free System for Cu CMP

Integrated Post CMP Waste Treatment

Forces Encountered in CMP

Modeling of the Chemical-Mechanical Polishing Process

Modeling the Effect of Bumpy Abrasive Particles on Chemical-Mechanical Polishing

Modeling the Effect of Colloidal Forces on Chemical-Mechanical Polishing

 

DEPOSITION IN LUNG: Inhalation Dosimetry/Exposure Index of Fiber Aerosol in Human Respiratory Tract

Combined Research and Curriculum Development Project

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