CMP at CAMP

"Clarkson has become an international leader in several aspects of CMP research. We have an interdisciplinary research team of engineers and scientists collaborating on CMP research at CAMP that has led to innovations in materials and methods that have been adopted by the semiconductor industry." Dr. S.V. Babu, CAMP Director

Read more about CMP at CAMP here.

Students taking classes outside on the Clarkson campus

Center for Advanced Materials Processing Researching

Colloid and Surface Technologies:

Colloidal Dispersions and Processing

  • Polymer blends and foams
  • Surfactants, liquid crystals and gels
  • Colloidal catalysts
  • Sols

Colloidal Dispersions and Processing Publications

Nanosystems

  • Nano-particle synthesis
  • Nano-composites
  • Self-assembly
  • Biomaterials and biological systems

Multimedia software on Nanomaterials

Nanosystems Publications

Particle Transport, Deposition and Removal

  • Modeling of fluid flows
  • Flow visualization
  • Wet particulate cleaning processes

Particle Transport, Deposition and Removal Publications

Chemical-Mechanical Planarization (CMP)

  • Metal & dielectric film polishing
  • Abrasives
  • Role of chemical & tool parameters
  • Post-CMP cleaning
  • Modeling of fluid flow and heat and mass transfer
  • Integration issues

CMP Publications

Particle Synthesis and Properties

  • Uniform micro- and nanoparticle synthesis
  • Inorganic/organic composites
  • Optical, magnetic and electrical properties
  • Adhesion and coagulation

Particle Synthesis and Properties Publications

Thin Films and Coatings

  • Coated particles and fibers
  • CVD and PECVD
  • Adhesion

Thin Films and Coatings Publications

Supporting Technologies

  • Microstructural characterization
  • Instrumental techniques
  • Processing of dispersions

Supporting Technologies Publications

Research Experience for Undergraduates in Nanoscale Science and Engineering for Materials Systems and Materials Processing

This program, funded by the National Science Foundation and the Air Force Office of Scientific Research, supports summer research project experiences for undergraduate students. Projects focus on nanomaterials, materials processing and materials systems.