S.V. Babu
Distinguished University Professor and Director, CAMP
350 CAMP
Clarkson University
PO Box 5665
Potsdam, NY 13699-5665
Phone: 315-268-2336
E-mail: babu@clarkson.edu
Educational Background:
Ph.D. (Physics) SUNY at Stony Brook, USA, 1971
Graduate study in Chemical Engineering Johns Hopkins Univ., Baltimore, USA, 1963-66
M.Tech (Chem. Eng.) Indian Inst. of Tech., Kharagpur, INDIA, 1963
B.Tech (Chem. Eng.) Andhra University, INDIA, 1962
Research Interests:
- Chemical mechanical planarization (CMP) of Cu, Ta & SiO2 films and structures
- CMP for shallow-trench isolation
- Selective CMP for metal and dielectric films
- Particle-free solutions for CMP
- Post-CMP cleaning
- Particle-Surface Interactions
Professional and Honor Socities
Professional Activities and Honors
Contracts and Grants Administered








